Loading...
Changes Saved.
Error Occurred!
AQUABOND TECHNOLOGIES DATABASE, AQUABOND APPLICATION BULLETINS, AQUABOND PROCESS DATA SHEETS - Aquabond 85 Aquabond 65 Aquabond 55 quartz wafer dicing temporary mounting temporary bonding
HOME - THERMOPLASTICS - CLEANING AGENTS - AQUACLEAN 500™ - APPLICATIONS - PRICING - PRODUCT DATA - DISTRIBUTORS - DATABASE - CONTACT

Dicing Lithium Niobate (LiNbO3)

OBJECTIVE

Develop a process to dice lithium niobate  (LiNbO3) bars.

 

SPECIFICATIONS

Max. Edge Chipping:  20mm

 

OUTLINE

 

Initial testing was conducted with a resin-bond blade, but chipping at the entrance and exit corners exceeded specification.

The required edge quality was achieved by reducing wheel grit size and concentration. Switching to a metal-bond also reduced blade wear. The final test parameters are shown in Table 1:

Table 1  Test Parameters

 Machine

RIGID Cantilever such as Aii-Veeco

 

Wheel

Metal Bond (call Aquabond for details)

Size

4.3 x .006 x 2.75”

Spindle Speed

6000 RPM

Feedrate

1.0 IPM

Wheel Exposure

.055”

Material

LiNbO3 strips, .019 x .052 x 3.0”

Depth of Cut

.021” (thru)

Cut Direction

Climb Cut

Fixture

Steel block

Bonding

Aquabond 55

Substrate

Unfired lava

Initial Dressing Cycle

NMVC800-J8VCA, ½ x ½ x 6”

(10) 1/2” lg. passes @ 2500 RPM / 4 IPM

.040” D.O.C

In-process Dressing

None

Coolant

19°C DI water

@ 0.5 GPM thru single .100” dia. nozzle

 

RESULTS

 

A total of (44) parts were generated and randomly inspected:

 

Table 2  Test Results

 

Specification

Actual

Part Length (mm)

-

1.232 – 1.237

Max. Chip Width (mm)

.020

.017




1

Add Comment

Please also verify yourself by typing the text in the following image into the box below it.

Related Articles

  • Optical Glass Bars (100%)
    Optical Glass Bars SPECIFICATIONS Cut Length:  3.2...
    0.00 - 2009-03-09 17:42:17
  • Ceramic Package Array (95.83%)
    OBJECTIVE Develop a process to dice ceramic package arrays. Blade...
    0.00 - 2009-03-09 17:34:24
  • DWDM Dicing Process Outline (94.1%)
    TYPICAL SPECIFICATION:Material:  F7 soda-lime...
    0.00 - 2009-03-09 19:20:05


Aquabond Technologies™ . 5235 Mission Oaks Boulevard #300, Camarillo, California 93012