Dicing Lithium Niobate (LiNbO3)OBJECTIVE
Develop a process to dice lithium niobate (LiNbO3) bars.
SPECIFICATIONS
Max. Edge Chipping: 20mm
OUTLINE
Initial testing was conducted with a resin-bond blade, but chipping at the entrance and exit corners exceeded specification. The required edge quality was achieved by reducing wheel grit size and concentration. Switching to a metal-bond also reduced blade wear. The final test parameters are shown in Table 1: Table 1 Test Parameters
RESULTS
A total of (44) parts were generated and randomly inspected:
Table 2 Test Results
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